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Title:一种三自由度压电驱动微纳定位平台
Institution:机械工程学院
Type of Patent:发明
Application Number:201610524011.9
Number of Inventors:1
Service Invention or Not:No
Application Date:2016-07-04
Publication Date:2018-04-27
Authorization Date:2018-04-27
Release Time:2019-04-15