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Title:一种高精度直写式真空镀膜设备及方法
Institution:机械工程学院
Type of Patent:发明
Application Number:2018111728839
Number of Inventors:1
Service Invention or Not:No
Application Date:2018-10-09
Publication Date:2020-01-24
Authorization Date:2020-01-24
Release Time:2019-04-15