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Title:一种二自由度压电驱动纳米定位平台
Institution:机械工程学院
Type of Patent:Invent
Application Number:201510004567.0
Number of Inventors:1
Service Invention or Not:No
Application Date:2015-01-06
Publication Date:2016-05-04
Authorization Date:2016-05-04
Release Time:2019-04-15