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Title:一种二维高精度压电定位平台及方法
Institution:机械工程学院
Type of Patent:Invent
Application Number:202210310160.0
Number of Inventors:1
Service Invention or Not:No
Application Date:2022-03-28
Publication Date:2023-06-13
Authorization Date:2023-06-13
Release Time:2023-09-09