Hits:
Affiliation of Author(s):新一代半导体材料研究院
Journal:《无机材料学报》
First Author:张福生
Document Code:6E4C9FC0B96542F08EE25AD1F7707406
Issue:11
Number of Words:2550
Translation or Not:no
Date of Publication:2016-11-04
Pre One:无微管缺陷六英寸SiC 单晶的制备