无微管缺陷六英寸SiC 单晶的制备
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Institution:新一代半导体材料研究院
Title of Paper:无微管缺陷六英寸SiC 单晶的制备
Journal:硅酸盐学报
First Author:张福生
Document Code:8245878551654D7C9C9736E456888510
Issue:4
Number of Words:6455
Translation or Not:No
Date of Publication:2021-04
Release Time:2021-12-09