Title:一种蓝宝石模板上GaN单晶衬底高温激光剥离装置及剥离方法
Institution:新一代半导体材料研究院
Type of Patent:Invent
Application Number:202110855731.4
Number of Inventors:10
Service Invention or Not:No
Application Date:2021-07-28
Publication Date:2024-03-22
Authorization Date:2024-03-22
Release Time:2024-10-17