Title:一种一步烧结高质量氮化铝原料的方法
Institution:新一代半导体材料研究院
Type of Patent:Invent
Application Number:202211039523.8
Number of Inventors:4
Service Invention or Not:No
Application Date:2022-08-29
Publication Date:2023-10-24
Authorization Date:2023-10-24
Release Time:2024-10-17
