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Effect of substrate temperature on sputtered indium-aluminum-zinc oxide films and thin film transistors

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Institution:微电子学院

Title of Paper:Effect of substrate temperature on sputtered indium-aluminum-zinc oxide films and thin film transistors

Journal:Journal of Alloys and Compounds,2019,791,771-778. 中科院1区,top,IF:6.371

First Author:Weidong Xu, Jianfeng Jiang, Sanjin Xu, Yu Zhang, Huayong Xu, Lin Han, Xianjin Feng*

Document Code:A269BF9DB1814499B4D09E3D81F88F26

Issue:

Number of Words:3

Translation or Not:No

Date of Publication:2019-06

Release Time:2019-10-26

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