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Institution:信息科学与工程学院
Title of Paper:Phosphorous-Doped α -Si Film Crystallization Using Heat-Assisted Femtosecond Laser Annealing
Journal:IEEE Transactions on Semiconductor Manufacturing
First Author:詹学鹏
All the Authors:陈杰智
Document Code:009CCE70EBA84C9B9B9FD72199BC9E7C
Translation or Not:No
Date of Publication:2019-11
Release Time:2020-03-06