Professor
Supervisor of Master's Candidates
The Last Update Time: ..
Phosphorous-Doped alpha-Si Film Crystallization Using Heat-Assisted Femtosecond Laser Annealing
Affiliation of Author(s):信息科学与工程学院
Journal:IEEE Transactions on Semiconductor Manufacturing
First Author:詹学鹏
Document Code:15394E8D5C8548D3829EE522B654EDC3
Volume:33
Issue:1
Page Number:116
Number of Words:5
Translation or Not:no
Date of Publication:2020-02-03