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Phosphorous-Doped α -Si Film Crystallization Using Heat-Assisted Femtosecond Laser Annealing
Affiliation of Author(s):信息科学与工程学院
Journal:IEEE Transactions on Semiconductor Manufacturing
First Author:詹学鹏
Document Code:009CCE70EBA84C9B9B9FD72199BC9E7C
Issue:1
Number of Words:4
Translation or Not:no
Date of Publication:2019-11-13