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Institution:信息科学与工程学院
Title of Paper:Significant Reliability Improvement by Inducing Dual Atomic-Thin Titanium Intercalation Layers in Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> Films
Journal:IEEE Electron Device Letters
First Author:台路
Document Code:CF164AC117BB45CE8FAA0F82BEDC4AE4
Volume:44
Issue:5
Page Number:753
Number of Words:3000
Translation or Not:No
Date of Publication:2023-05
Release Time:2023-10-31