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中文
Xuepeng Zhan

Professor
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates


Gender:Male
Alma Mater:吉林大学
Education Level:Postgraduate (Postdoctoral)
Degree:Doctor
Status:Employed
School/Department:信息科学与工程学院
Date of Employment:2019-07-01
College: School of Information Science and Engineering
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Current position: 英文主页 >> Scientific Research >> Paper Publications
Comprehensive Analysis of Oxidant Effects During ALD Process of Hf0.5Zr0.5O2 Ferroelectric Thin Films

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Institution:信息科学与工程学院

Title of Paper:Comprehensive Analysis of Oxidant Effects During ALD Process of Hf0.5Zr0.5O2 Ferroelectric Thin Films

Journal:IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY

First Author:李晓鹏

Document Code:1934548234689994754

Number of Words:3

Translation or Not:No

Date of Publication:2025-01

Release Time:2025-10-02

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