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Institution:信息科学与工程学院
Title of Paper:Temperature-dependent wakeup behavior in back-end-of-line compatible ultra-thin HfxZr1?xO2 ferroelectric film
Journal:SCIENCE CHINA-Information Sciences
Document Code:1934548214523781121
Volume:68
Issue:6
Number of Words:3
Translation or Not:No
Date of Publication:2025-06
Release Time:2025-10-02