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一种碳化硅器件双层金属的刻蚀方法
Release Time:2024-08-22| Hits:
Title:一种碳化硅器件双层金属的刻蚀方法
Institution:新一代半导体材料研究院
Type of Patent:Invent
Application Number:202311623560.8
Number of Inventors:3
Service Invention or Not:No
Application Date:2023-11-30
Publication Date:2024-08-02
Authorization Date:2024-08-02
Release Time:2024-08-22
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