Patents
一种碳化硅器件双层金属的刻蚀方法
2024-08-22 Hits:
Affilication of Author(s):新一代半导体材料研究院
Type of Patent:发明
Application Number:202311623560.8
Number of Inventors:3
Service Invention or Not:no
Application Date:2023-11-30
Publication Date:2024-08-02
Authorization Date:2024-08-02
Publication Date:2024-08-02
Application Date:2023-11-30
Authorization Date:2024-08-02
Copyright All Rights Reserved Shandong University Address: No. 27 Shanda South Road, Jinan City, Shandong Province, China: 250100
Information desk: (86) - 0531-88395114
On Duty Telephone: (86) - 0531-88364731 Construction and Maintenance: Information Work Office of Shandong University