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一种碳化硅器件双层金属的刻蚀方法
2024-08-22  Hits:

Affilication of Author(s):新一代半导体材料研究院
Type of Patent:发明
Application Number:202311623560.8
Number of Inventors:3
Service Invention or Not:no
Application Date:2023-11-30
Publication Date:2024-08-02
Authorization Date:2024-08-02
Publication Date:2024-08-02
Application Date:2023-11-30
Authorization Date:2024-08-02