专利
Micro-machined optical pressure sensors
  • 专利说明:
    A micro-machined optical pressure sensor, comprising: a diaphragm configured to deform when a force is applied thereto; and a sensing micro-ring spaced apart from the diaphragm by a gap, the gap being variable depending on the force applied on the diaphra
  • 专利类型:
    PCT或外国申请
  • 专利状态:
    授权专利
  • 授权号:
    US9823150B2
  • 是否职务专利:

上一条:Bolometer, method of fabricating the same, and bolometric method

版权所有   ©山东大学 地址:中国山东省济南市山大南路27号 邮编:250100 
查号台:(86)-0531-88395114
值班电话:(86)-0531-88364731 建设维护:山东大学信息化工作办公室