专利
Micro-machined optical pressure sensors
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专利说明:
A micro-machined optical pressure sensor, comprising: a diaphragm configured to deform when a force is applied thereto; and a sensing micro-ring spaced apart from the diaphragm by a gap, the gap being variable depending on the force applied on the diaphra
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专利类型:
PCT或外国申请
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专利状态:
授权专利
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授权号:
US9823150B2
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是否职务专利:
否
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