专利
Micro-machined optical pressure sensors
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专利说明：
A micro-machined optical pressure sensor, comprising: a diaphragm configured to deform when a force is applied thereto; and a sensing micro-ring spaced apart from the diaphragm by a gap, the gap being variable depending on the force applied on the diaphra
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专利类型：
PCT或外国申请
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专利状态：
授权专利
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授权号：
US9823150B2
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是否职务专利：
否
上一条：Bolometer, method of fabricating the same, and bolometric method
