专利
Bolometer, method of fabricating the same, and bolometric method
  • 专利说明:
    Various aspects of this disclosure provide a bolometer including a substrate and a ring resonator structure over the substrate. The bolometer may also include a silicon oxide layer in thermal contact with the ring resonator structure. The bolometer may fu
  • 专利类型:
    PCT或外国申请
  • 专利状态:
    授权专利
  • 授权号:
    US10151638B2
  • 是否职务专利:

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