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    Hot-zone design and optimization of resistive heater for SiC single crystal growth

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    • Institution:新一代半导体材料研究院

    • Title of Paper:Hot-zone design and optimization of resistive heater for SiC single crystal growth

    • Journal:JOURNAL OF MATERIALS SCIENCE Journal

    • First Author:王兴龙

    • Document Code:E30905E21DD84A7D8F8435329EB0643D

    • Issue:19

    • Number of Words:3000

    • Translation or Not:No

    • Date of Publication:2024-05

    • Release Time:2024-05-16
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