标题:
Induction frequency modulation for 4H-SiC growth: Thermal field evolution, dislocation suppression, and high-quality crystal preparation via PVT method
点击次数:
所属单位:
新一代半导体材料研究院
论文名称:
Induction frequency modulation for 4H-SiC growth: Thermal field evolution, dislocation suppression, and high-quality crystal preparation via PVT method
发表刊物:
JOURNAL OF ALLOYS AND COMPOUNDS
第一作者:
王兴龙
论文编号:
1945405047454982145
卷号:
1036
字数:
3000
是否译文:
否
发表时间:
2025-06
发布时间:
2025-10-01