Project Name:垂直环沟道场效应晶体管原子层沉积制备高质量氧化物薄膜的多尺度研究
Institution:信息科学与工程学院
Leading Scientist:李元
Nature of Project:纵向
Project Level:National
Project Number:3FD06C18A191A8B1E0635C00A8C075BE
Project Approval Number:52575661
Date of Project Approval:2025-08-27
Scheduled Completion Time:2029-12-31
Date of Project Completion:2029-12-31
Date of Project Initiation:2026-01-01
Release Time:2025-09-29