Title : Effect of Ta doping on the properties of beta-Ga2O3 heteroepitaxial films prepared on KTaO3(100) substrates

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Affiliation of Author(s):集成电路学院

Title of Paper:Effect of Ta doping on the properties of beta-Ga2O3 heteroepitaxial films prepared on KTaO3(100) substrates

Journal:Journal of Materials Science: Materials in Electronics

First Author:王迪

Document Code:B219DC80D7834A9FA49D4957ED10C84F

Volume:32

Issue:3

Page Number:2757

Number of Words:5

Translation or Not:no

Date of Publication:2021-02-01