Title : Synthesis and characterization of single-crystalline delta-Ta2O5 epitaxial films on Y-stabilized ZrO2 (111) substrates

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Affiliation of Author(s):微电子学院

Title of Paper:Synthesis and characterization of single-crystalline delta-Ta2O5 epitaxial films on Y-stabilized ZrO2 (111) substrates

Journal:CERAMICS INTERNATIONAL Journal

First Author:乐永

Indexed by:Unit Twenty Basic Research

Document Code:6116E1F3B7E64F9D9EA9BB812731DEF9

Volume:47

Issue:4

Page Number:5510

Translation or Not:no

Date of Publication:2021-02-15