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闫鹏

Professor


Gender:Male
Status:Employed
School/Department:机械工程学院
Date of Employment:2011-11-22
College: School of Mechanical Engineering
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Current position: Home >> Scientific Research >> Paper Publications
Low thermal budget lead zirconate titanate thick films integrated on Si for piezo-MEMS applications

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Institution:材料科学与工程学院

Title of Paper:Low thermal budget lead zirconate titanate thick films integrated on Si for piezo-MEMS applications

Journal:Microelectronic Engineering

First Author:欧阳俊

All the Authors:闫静,闫鹏,欧阳俊

Document Code:F8B64D6C8D6C41D5BE6B205D238AE249

Number of Words:6

Translation or Not:No

Date of Publication:2020-01

Release Time:2019-12-24

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