Qr code
中文
闫鹏

Professor


Gender:Male
Status:Employed
School/Department:机械工程学院
Date of Employment:2011-11-22
MOBILE Version
Click:Times

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Current position: Home >> Scientific Research >> Paper Publications

Low thermal budget lead zirconate titanate thick films integrated on Si for piezo-MEMS applications

Hits: Praise

Affiliation of Author(s):材料科学与工程学院

Journal:Microelectronic Engineering

All the Authors:ouyangjun,yanjing,yanpeng

First Author:ouyangjun

Indexed by:Applied Research

Document Code:F8B64D6C8D6C41D5BE6B205D238AE249

Translation or Not:no

Date of Publication:2020-01-15

 

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