Professor
The Last Update Time: ..
Large piezoelectricity on Si from highly (001)-oriented PZT thick films via a CMOS-compatible sputtering/RTP process
Affiliation of Author(s):材料科学与工程学院
Journal:Materialia
All the Authors:ouyangjun,yanjing,yanpeng
First Author:ouyangjun
Indexed by:Applied Research
Document Code:F03F8223187842FA8E030EC46C967D34
Translation or Not:no
Date of Publication:2019-03-01