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中文
闫鹏

Professor


Gender:Male
Status:Employed
School/Department:机械工程学院
Date of Employment:2011-11-22
College: School of Mechanical Engineering
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Current position: Home >> Scientific Research >> Paper Publications
Large piezoelectricity on Si from highly (001)-oriented PZT thick films via a CMOS-compatible sputtering/RTP process

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Institution:材料科学与工程学院

Title of Paper:Large piezoelectricity on Si from highly (001)-oriented PZT thick films via a CMOS-compatible sputtering/RTP process

Journal:Materialia

First Author:欧阳俊

All the Authors:闫静,闫鹏,欧阳俊

Document Code:F03F8223187842FA8E030EC46C967D34

Number of Words:10

Translation or Not:No

Date of Publication:2019-03

Release Time:2019-12-24

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