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Frequency-shaped sliding mode control of piezoelectric nano-stages with hysteresis estimation
Affiliation of Author(s):机械工程学院
Journal:ISA Transactions
First Author:Zhang, Yangming
Document Code:0EC0BE8D376E4BA4BFEA26194342A6E0
Volume:107
Page Number:340
Number of Words:3000
Translation or Not:no
Date of Publication:2020-12-01