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闫鹏

Professor


Gender:Male
Status:Employed
School/Department:机械工程学院
Date of Employment:2011-11-22
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Current position: Home >> Scientific Research >> Paper Publications

Revelation of the dislocations in the C-face of 4H-SiC substrates using a microwave plasma etching treatment

Hits: Praise

Affiliation of Author(s):晶体材料研究院

Journal:CrystEng Comm

First Author:欧阳俊

Indexed by:Unit Twenty Basic Research

Document Code:C8AAD6E1796B4EB4B2D502DEF34AFBEF

Volume:23

Issue:2

Page Number:353

Translation or Not:no

Date of Publication:2021-01-14

 

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