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Gender:Male
Status:Employed
School/Department:机械工程学院
Date of Employment:2011-11-22
College: School of Mechanical Engineering
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Revelation of the dislocations in the C-face of 4H-SiC substrates using a microwave plasma etching treatment

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Institution:晶体材料研究院

Title of Paper:Revelation of the dislocations in the C-face of 4H-SiC substrates using a microwave plasma etching treatment

Journal:CrystEng Comm

First Author:欧阳俊

Document Code:C8AAD6E1796B4EB4B2D502DEF34AFBEF

Volume:23

Issue:2

Page Number:353

Translation or Not:No

Date of Publication:2021-01

Release Time:2021-05-31

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