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Enhanced device performance of GaN high electron mobility transistors with in situ crystalline SiN cap layer
Affiliation of Author(s):新一代半导体材料研究院
Journal:APPLIED PHYSICS LETTERS
First Author:罗鑫
Document Code:1843556233512062977
Volume:125
Issue:12
Number of Words:4000
Translation or Not:no
Date of Publication:2024-09-16