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Development of a novel monolithic compliant Lorentz-force-driven XY nanopositioning system

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  • Affiliation of Author(s):海洋研究院

  • Journal:JOURNAL OF MICROMECHANICS AND MICROENGINEERING

  • First Author:杨旭

  • Document Code:DFD29FEB371B4FE0AEE5244E0D74CF9B

  • Volume:34

  • Issue:055001

  • Page Number:1

  • Number of Words:7

  • Translation or Not:no

  • Date of Publication:2024-05-01

  • Date of Publication:2024-05-01
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