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Development of a Parallel Dual-Stage Compliant Nanopositioning System

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  • Affiliation of Author(s):海洋研究院

  • Journal:Actuators

  • First Author:杨旭

  • Document Code:839B1B46FF264AC5AD16DC24809B5A8E

  • Volume:11

  • Issue:136

  • Page Number:1

  • Number of Words:6

  • Translation or Not:no

  • Date of Publication:2022-05-13

  • Date of Publication:2022-05-13
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