Fabrication and Characterization of Gate-Last Self-Aligned AlN/GaN MISHEMTs With In Situ SiNx Gate Dielectric
点击次数:
发表刊物:IEEE Transactions on Electron Devices
全部作者:Jun Ma,Huaxing Jiang,Chao Liu,Peiqiang Xu
第一作者:Xing Lu
论文类型:期刊论文
通讯作者:Kei May Lau
卷号:62
页面范围:1862
是否译文:否
发表时间:2015-09-01
发表时间:2015-09-01