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High performance anatase-TiO2 thin film transistors with a two-step oxidized TiO2 channel and plasma enhanced atomic layer-deposited ZrO2 gate dielectric
  • Journal:
    Applied Physics Express
  • All the Authors:
    Peng Cui,Guangyang Lin,Yuying Zhang,Maria Gabriela Sales,Meng Jia,Zhengxin Li,Christopher Goodwin,Thomas Beebe,Lars Gundlach,Chaoying Ni,Stephen McDonnell
  • First Author:
    Jie Zhang
  • Indexed by:
    Journal paper
  • Correspondence Author:
    Yuping Zeng
  • Volume:
    12
  • Issue:
    9
  • Page Number:
    096502
  • Translation or Not:
    no
  • Included Journals:
    SCI
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