Title:一种确定GaN晶体管纳米尺寸栅长二维电子气面密度的方法
Institution:新一代半导体材料研究院
Type of Patent:Invent
Application Number:202310430551.0
Number of Inventors:8
Service Invention or Not:No
Application Date:2023-04-18
Publication Date:2024-01-30
Authorization Date:2024-01-30
Release Time:2024-05-18