Title:一种氮化镓HEMT器件及其制备方法
Institution:新一代半导体材料研究院
Type of Patent:Invent
Application Number:202410088982.8
Number of Inventors:4
Service Invention or Not:No
Application Date:2024-01-23
Publication Date:2024-09-06
Authorization Date:2024-09-06
Release Time:2025-01-04