Title of Paper:Performance enhancement of monolayer MoS2 transistors by atomic layer deposition of high-k dielectric assisted by Al2O3 seed layer

Journal:Journal of Physics D: Applied Physics

First Author:Guangyang Lin

Correspondence Author:Yuping Zeng

All the Authors:Meng-Qiang Zhao,Meng Jia,Jie Zhang,Peng Cui,Lincheng Wei,Haochen Zhao,AT Charlie Johnson,Lars Gundlach

Volume:53

Issue:10

Page Number:105103

DOI Number:10.1088/1361-6463/ab605b

Translation or Not:No

Date of Publication:2019-12

Included Journals:SCI

Release Time:2021-11-29